Discharge parameters of a magnetron with a molybdenum target

In this work, we study the features of discharge a magnetron with cold molybdenum target in an argon environment using Langmuir probe. The novelty work is due to placement probe near anode. I-V characteristics were measured range current densities 27–96 mA/cm2 at pressures 2 – 4 mTorr. experimental used calculate electron temperature, ion and density. It was found that density charge carriers increases temperature decreases increase current. addition, it ions anode almost order magnitude lower than electrons, weakly depends on pressure.